Simulation of Vacuum Characteristics in Semiconductor Processing Vacuum System by the Combination of Vacuum Pumps
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of the Korean Institute of Electrical and Electronic Material Engineers
سال: 2011
ISSN: 1226-7945
DOI: 10.4313/jkem.2011.24.6.449